Long-term changes in Al thin-film extreme ultraviolet filters

0550989 - ÚFP 2022 RIV US eng J - Článek v odborném periodiku
Schmidt, Jiří - Koláček, Karel - Frolov, Oleksandr - Štraus, Jaroslav - Hoffer, Petr - Stelmashuk, Vitaliy - Tuholukov, Andrii - Jiříček, Petr - Houdková, Jana
Long-term changes in Al thin-film extreme ultraviolet filters.
Applied Optics. Roč. 60, č. 28 (2021), s. 8766-8773. ISSN 1559-128X. E-ISSN 2155-3165
Grant CEP: GA MŠMT(CZ) LTC20061; GA MŠMT LTT17015; GA ČR(CZ) GA18-12386S
Grant ostatní: European Cooperation in Science and Technology(BE) CA17126; AV ČR(CZ) StrategieAV21/6
Program: COST; StrategieAV
Institucionální podpora: RVO:61389021 ; RVO:68378271
Klíčová slova: Al thin-film * extreme ultraviolet filters * Al2O3
Obor OECD: Optics (including laser optics and quantum optics); Optics (including laser optics and quantum optics) (FZU-D)
Impakt faktor: 1.905, rok: 2021
Způsob publikování: Omezený přístup
https://www.osapublishing.org/ao/abstract.cfm?uri=ao-60-28-8766

Thin-film Al filters are very popular owing to their high transmittance in the wavelength range of 17–67 nm and low transmittance in the visible and near-UV regions, however, they are prone to oxidation. The amorphous Al2O3 layers on the Al surfaces have much smaller transmittance than the bulk Al material - therefore, they strongly influence the total transmittance of the filter. This paper not only provides the transmittance of very old Al filters but also maps the transmittance development of Al filters over two years since their delivery (in 2016) in an uncontrolled atmosphere.
Trvalý link: http://hdl.handle.net/11104/0326266