Surface treatment of ZnO microrods by the inductively coupled hydrogen plasma with self-biased holder

0549951 - FZÚ 2022 RIV SK eng C - Konferenční příspěvek (zahraniční konf.)
Remeš, Zdeněk - Buryi, Maksym - Sharma, Dhananjay K. - Kromka, Alexander - Potocký, Štěpán - Shagieva, Ekaterina - Poruba, A. - Mičová, J.
Surface treatment of ZnO microrods by the inductively coupled hydrogen plasma with self-biased holder.
Proceedings of ADEPT - ADEPT 2021. Žilina: University of Žilina, 2021 - (Jandura, D.; Maniaková, P.; Lettrichová, I.; Kováč, jr., J.), s. 37-40. ISBN 978-80-554-1806-3.
[9th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2021. Podbanské (SK), 20.09.2021-23.09.2021]
Grant CEP: GA MŠMT(CZ) EF16_019/0000760; GA ČR GC19-02858J
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; AV ČR(CZ) SAV-21-09
Program: Bilaterální spolupráce
Institucionální podpora: RVO:68378271
Klíčová slova: surface * hydrogen * plasma * ZnO * Raman scattering * photoluminescence
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)

Inductively coupled plasma (ICP) operating at the radio frequency (RF) of 13.56 MHz has been used as a low-pressure treatment method providing further adjustment of surface properties. We elucidate the role of the self-bias of the substrate holder on optical properties of a ZnO surface exposed to hydrogen plasma.
Trvalý link: http://hdl.handle.net/11104/0325847