The changes induced on oriented ZnO surface by inductively coupled plasma (ICP)

0549949 - FZÚ 2022 RIV FR eng A - Abstrakt
Remeš, Zdeněk - Artemenko, Anna - Ukraintsev, Egor - Rezek, B. - Poruba, A. - Hsu, H.S. - Mičová, J.
The changes induced on oriented ZnO surface by inductively coupled plasma (ICP).
E-MRS Spring Meeting - Symposia & program Section N Current trends in optical and X-ray metrology of advanced materials for nanoscale devices VI. Strasbourg: European Materials Research Society (E-MRS), 2021.
[2021 Spring Meeting of the European Materials Research Society (E-MRS). 31.05.2021-03.06.2021, Virtual]
Grant CEP: GA MŠMT(CZ) EF16_019/0000760; GA ČR GC19-02858J; GA MŠMT LM2018110
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; AV ČR(CZ) SAV-21-09; AV ČR(CZ) StrategieAV21/6
Program: Bilaterální spolupráce; StrategieAV
Institucionální podpora: RVO:68378271
Klíčová slova: ICP * ZnO * XPS * AFM
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)

The plasma treatment has been done in a novel inductively coupled plasma (ICP) quartz reactor recently developed in the cooperation with the Czech company SVCS Process Innovation s. r. o. in Valazske Mezirici. The reactor operates at the radio frequency 13.56 MHz with up to 300 W discharge power and H2, O2, N2 and Ar process gasses at low pressure about 20 Pa. X-ray photoelectron spectroscopy (XPS) showed contamination of plasma processed ZnO powder surface by silicon and fluorine from quartz walls and polytetrafluoroethylene (PFTE) sealing that disappeared after reducing a parasitic capacitive coupling between antenna and grounded stainless steel holder. We measure topography and surface potential of ZnO nanorods and monocrystalline ZnO samples after different plasma treatments by atomic force microscopy (AFM) and Kelvin probe force microscopy (KFPM). Preliminary results show similar morphology before and after plasma treatment, but different average surface potential values.
Trvalý link: http://hdl.handle.net/11104/0325863