Development and measurement of gas sensors based on diamond and transition metal dichalcogenide materials

0546604 - FZÚ 2022 RIV SK eng C - Konferenční příspěvek (zahraniční konf.)
Kočí, Michal - Izsák, T. - Vanko, M. - Sojková, M. - Husák, M. - Kromka, Alexander
Development and measurement of gas sensors based on diamond and transition metal dichalcogenide materials.
Proceedings of ADEPT - ADEPT 2021. Žilina: University of Žilina, 2021 - (Jandura, D.; Maniaková, P.; Lettrichová, I.; Kováč, jr., J.), s. 115-118. ISBN 978-80-554-1806-3.
[9th International Conference on Advances in Electronic and Photonic Technologies - ADEPT 2021. Podbanské (SK), 20.09.2021-23.09.2021]
Grant CEP: GA MŠMT(CZ) EF16_019/0000760; GA MŠMT LM2018110
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760; AV ČR(CZ) SAV-21-10
Program: Bilaterální spolupráce
Institucionální podpora: RVO:68378271
Klíčová slova: nanocrystalline diamond (NCD) * transition metal dichalcogenide (TMD) * gas detectors
Obor OECD: Materials engineering

Gas sensing properties of a nanocrystalline diamond with hydrogen-terminated surface (H-NCD) and a transition metal dichalcogenide (TMD) are investigated as conductivity sensors employing device design with built-in interdigital metal electrode structures. The TMDs were prepared by a carbide-free one-zone sulfurization method directly on the SiO2/Si or NCD/Si substrates. On the individual level, the sensors showed a notable electrical response to the examined gas types, i.e., oxidizing (NO2) and reducing (NH3) gases. For reference, commercially available sensor was used (conductive SnO2 or infra-red type). Advantageously, it was found that the NCD/TMD heterostructure results in enhanced signal stability and gas sensing response at room temperature compared to both bare TMD and H-NCD layers.
Trvalý link: http://hdl.handle.net/11104/0323058