Oxidation of amorphous HfNbTaTiZr high entropy alloy thin films prepared by DC magnetron sputtering

0542816 - FZÚ 2022 RIV NL eng J - Článek v odborném periodiku
Hruška, Petr - Lukáč, František - Cichoň, Stanislav - Vondráček, Martin - Čížek, J. - Fekete, Ladislav - Lančok, Ján - Veselý, J. - Minárik, P. - Cieslar, M. - Melikhova, O. - Kmječ, T. - Liedke, M.O. - Butterling, M. - Wagner, A.
Oxidation of amorphous HfNbTaTiZr high entropy alloy thin films prepared by DC magnetron sputtering.
Journal of Alloys and Compounds. Roč. 869, July (2021), č. článku 157978. ISSN 0925-8388. E-ISSN 1873-4669
Grant CEP: GA ČR GA17-17016S; GA MŠMT(CZ) EF16_019/0000760
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271 ; RVO:61389021
Klíčová slova: high entropy alloys * HfNbTaTiZr * magnetron sputtering * x-ray photoelectron spectroscopy * positron annihilation spectroscopy
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.); Composites (including laminates, reinforced plastics, cermets, combined natural and synthetic fibre fabrics (UFP-V)
Impakt faktor: 6.371, rok: 2021
Způsob publikování: Omezený přístup
https://doi.org/10.1016/j.jallcom.2020.157978

High entropy alloys represent a new type of materials with a unique combination of physical properties originating from the occurrence of single-phase solid solutions of numerous elements. The preparation of nanostructured or amorphous structure in a form of thin films promises increased effective surface and high intergranular diffusion of elements as well as a high affinity to oxidation. In this work, we studied HfNbTaTiZr thin films, deposited at room temperature by DC magnetron sputtering from a single bcc phase target. Films exhibit cellular structure (~100 nm) with fine substructure (~10 nm) made of roundshape amorphous clusters. The composition is close to equimolar with slight Ti enrichment and without any mutual segregation of elements.
Trvalý link: http://hdl.handle.net/11104/0320208