Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications

0540754 - FZÚ 2021 RIV CH eng C - Konferenční příspěvek (zahraniční konf.)
Zehetner, J. - Kromka, Alexander - Izsák, Tibor - Vanko, G. - Gajdošová, L. - Kasemann, S.
Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications.
Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems. Basel: MDPI, 2020 - (Köck, A.; Deluca, M.), s. 1-3, č. článku 13. E-ISSN 2504-3900.
[International Conference on Functional Integrated nano Systems (nanoFIS 2020) /4./. Online (AT), 02.11.2020-04.11.2020]
Grant CEP: GA MŠMT(CZ) 8X20035
Institucionální podpora: RVO:68378271
Klíčová slova: diamond * GaN * MEMS * laser ablation
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)

We present the feasibility to fabricate membranes and cantilevers made of diamond grown on Si/SiO2 substrates by femtosecond laser ablation. In the ablation process, we generated nano‐ and microstructures on the membrane surface. Such laser induced periodic surface structures (LIPSS) are useful in tailoring the surface chemistry. In combination with wet‐ or reactive ion etching smooth membranes were generated.
Trvalý link: http://hdl.handle.net/11104/0318359