Growth defects in WC:H layers for tribological applications

0539174 - FZÚ 2021 RIV GB eng J - Článek v odborném periodiku
Mates, Tomáš - Polášek, J. - Mareš, P. - Dubau, M. - Vetushka, Aliaksi - Ledinský, Martin - Fejfar, Antonín - Vyskočil, J.
Growth defects in WC:H layers for tribological applications.
Vacuum. Roč. 178, Aug (2020), s. 1-7, č. článku 109372. ISSN 0042-207X. E-ISSN 1879-2715
Grant CEP: GA MŠMT EF16_026/0008382; GA MŠMT LM2018110; GA TA ČR(CZ) TH03020004
Grant ostatní: OP VVV - CARAT CZ.02.1.01/0.0/0.0/16_026/0008382
Institucionální podpora: RVO:68378271
Klíčová slova: DLC * PACVD * AFM * SEM * FIB * Raman
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 3.627, rok: 2020
Způsob publikování: Omezený přístup
https://doi.org/10.1016/j.vacuum.2020.109372

Friction and wear resistance are important factors of all mechanical tools and machines used in industry. Diamond-like carbon (DLC) and derived metal-carbon composite (WC:H) layers are known to substantially improve both of these factors and frequently find their use in tribological applications. Microscopic analysis of the WC:H layers shows a frequent occurrence of a certain type of structural defects that have major influence on the layer roughness. The defects are conically shaped objects penetrating the layer all the way down to the substrate, covered with a spherical cap on the top. The lateral dimensions of the defects vary from ~100 nm to ~1 um. To study these defects we prepared several layers at various conditions and analysed them by SEM, FIB, EDX, AFM and Raman spectroscopy. We will discuss the structure of the defects and influence of the preparation conditions on their growth and on their occurence in the layer.

Trvalý link: http://hdl.handle.net/11104/0316874