Počet záznamů: 1
Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection
- 1.0538978 - FZÚ 2021 RIV US eng J - Článek v odborném periodiku
Hofmann, S. - Lejček, Pavel - Zhou, G. - Yang, H. - Lian, S.Y. - Kovač, J. - Wang, J.Y.
Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection.
Journal of Vacuum Science and Technology. Part B. Nanotechnology & Microelectronics. Roč. 38, č. 3 (2020), s. 1-7, č. článku 034010. ISSN 2166-2746. E-ISSN 2166-2754
Institucionální podpora: RVO:68378271
Klíčová slova: SIMS * depth resolution * secondary clusters * MRI model
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 1.416, rok: 2020
Způsob publikování: Omezený přístup
https://doi.org/10.1116/6.0000108
The apparent improvement of the depth resolution in secondary ion mass spectrometry depth profiles using cluster secondary ions as compared to single ion profiles is explained on basis of an attractive interaction enhancing cluster formation.
Trvalý link: http://hdl.handle.net/11104/0316709
Počet záznamů: 1