An optical method for determination of the mass thickness of thin gold films with arbitrary morphology

0538891 - FZÚ 2021 RIV CH eng J - Článek v odborném periodiku
Starinskiy, S.V. - Safonov, A.I. - Sulyaeva, V.S. - Rodionov, A.A. - Shukhov, Y.G. - Bulgakov, Alexander
An optical method for determination of the mass thickness of thin gold films with arbitrary morphology.
Thin Solid Films. Roč. 714, Nov (2020), s. 1-7, č. článku 138392. ISSN 0040-6090. E-ISSN 1879-2731
Grant CEP: GA MŠMT EF15_003/0000445; GA MŠMT LM2015086
Grant ostatní: OP VVV - BIATRI(XE) CZ.02.1.01/0.0/0.0/15_003/0000445
Institucionální podpora: RVO:68378271
Klíčová slova: gold * thin film * laser deposition * nanosecond laser * film thickness * nanostructures
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 2.183, rok: 2020
Způsob publikování: Omezený přístup
https://www.sciencedirect.com/science/article/pii/S0040609020306003

The mass thickness of thin metal films is an important parameter determining the film structure, however a robust routine method for its determination is still missing. In this work, we have developed a simple optical method for determining the mass thickness of gold films with arbitrary morphology on transparent substrates in the range 1-20 nm. The method is based on film spectrophotometry in the far-UV range when the light attenuation is due to interaction with core electrons and thus the influence of the film morphology is negligible. The calibration was performed at a wavelength of 200 nm for gold films of known thickness and a good agreement with the Beer-Lambert law was obtained. The feasibility of the method was demonstrated with gold films of various morphologies produced on quartz substrates by pulsed laser deposition.
Trvalý link: http://hdl.handle.net/11104/0316634