Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

0538507 - FZÚ 2021 RIV US eng J - Článek v odborném periodiku
Espinoza Herrera, Shirly J. - Samparisi, F. - Frassetto, F. - Richter, Steffen - Rebarz, Mateusz - Finke, Ondřej - Albrecht, Martin - Jurkovič, Matěj - Hort, Ondřej - Fabris, N. - Zymaková, Anna - Mai, Dong-Du - Antipenkov, Roman - Nejdl, Jaroslav - Poletto, L. - Andreasson, Jakob
Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines.
Journal of Vacuum Science and Technology. Part B. Nanotechnology & Microelectronics. Roč. 38, č. 2 (2020), s. 1-5, č. článku 024005. ISSN 2166-2746. E-ISSN 2166-2754
Grant CEP: GA MŠMT EF16_019/0000789; GA MŠMT EF15_003/0000447; GA MŠMT LQ1606
Grant ostatní: OP VVV - ADONIS(XE) CZ.02.1.01/0.0/0.0/16_019/0000789; OP VVV - ELIBIO(XE) CZ.02.1.01/0.0/0.0/15_003/0000447
Výzkumná infrastruktura: ELI Beamlines III - 90141
Institucionální podpora: RVO:68378271
Klíčová slova: VUV ellipsometry * VUV polarizer * HHG * XUV ellipsometry
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 1.416, rok: 2020
Způsob publikování: Open access

In this paper, the authors present the characterization experiments of a 20fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer's Malus curve was obtained, the total acquisition time for each point of the curve was 30s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12mJ, 1kHz, 20fs, in-house-developed laser and detected by a back-illuminated charge-coupled device.
Trvalý link: http://hdl.handle.net/11104/0316302