Investigation of laser-produced plasma multistructuring by floating probe measurements and optical emission spectroscopy

0538500 - FZÚ 2021 RIV DE eng J - Článek v odborném periodiku
Irimiciuc, S.A. - Chertopalov, Sergii - Craciun, V. - Novotný, Michal - Lančok, Ján
Investigation of laser-produced plasma multistructuring by floating probe measurements and optical emission spectroscopy.
Plasma Processes and Polymers. Roč. 17, č. 11 (2020), s. 1-9, č. článku e2000136. ISSN 1612-8850. E-ISSN 1612-8869
Grant CEP: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA18-09347S
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271
Klíčová slova: floating current * Langmuir probe * optical emission spectroscopy * plasma multistructuring * pulsed laser ablation
Obor OECD: Fluids and plasma physics (including surface physics)
Impakt faktor: 3.872, rok: 2020
Způsob publikování: Omezený přístup
https://doi.org/10.1002/ppap.202000136

With the continuous development of pulsed laser deposition as a versatile technique for the deposition of complex thin films, there is a need for a better understanding of the role and control of the deposition parameters. The understanding of the particle kinetics and plasma chemistry during the deposition process can greatly improve the properties of the synthesized films. By using the floating voltage regime of the Langmuir probe technique, we performed angular and time‐resolved measurements during laser ablation of an Ag target, which evidenced the structuring of the plasma plume in ultrahigh vacuum conditions. The addition of N2 gas in the pressure range from 5 × 10–5 to 10 Pa leads to more rapid plasma thermalization and the control of its kinetic energy. The electrical measurements were complemented by optical emission spectroscopy, which showcased the presence of neutral and multiple ionized species distributed across the laser‐produced plasma plume.

Trvalý link: http://hdl.handle.net/11104/0316301