Laser-induced surface acoustic waves for thin film characterization

0537574 - FZÚ 2021 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Kudělka, R. - Václavek, L. - Tomáštík, Jan - Malecová, S. - Čtvrtlík, R.
Laser-induced surface acoustic waves for thin film characterization.
Acta Polytechnica CTU Proceedings. Vol. 27. Prague: Czech Technical University in Prague, 2020, s. 57-61. ISBN 978-80-01-06735-2. ISSN 2336-5382.
[International Conference on Local Mechanical Properties /14./. Prague (CZ), 06.11.2019-08.11.2019]
Institucionální podpora: RVO:68378271
Klíčová slova: anisotropy * laser-induced surface acoustic waves * nanoindentation * Young’s modulus * thin films
Obor OECD: Optics (including laser optics and quantum optics)

Knowledge of mechanical properties of thin films is essential for most of their applications.However, their determination can be problematic for very thin films. LAW (Laser-induced acousticwaves) is a combined acousto-optic method capable of measuring films with thickness from fewnanometers. It utilizes ultrasound surface waves which are excited via short laser pulses and detectedby a PVDF foil. Properties such as Young’s modulus, Poisson’s ratio and density of both the film andthe substrate as well as film thickness can be explored.Results from the LAW method are successfullycompared with nanoindentation for Young’s modulus evaluation and with optical method for filmthickness evaluation and also with literature data. Application of LAW for anisotropy mapping ofmaterials with cubic crystallographic lattice is also demonstrated
Trvalý link: http://hdl.handle.net/11104/0315395