Horizons in World Physics

0517476 - FZÚ 2020 RIV US eng M - Část monografie knihy
Pokorný, Petr - Novotný, Michal
Radicals and ions in magnetron sputtering discharges in noble gases.
Horizons in World Physics. New York: Nova Science Publishers Inc, 2019 - (Reimer, A.), s. 56-116. 297. ISBN 978-1-53614-712-4
Grant CEP: GA MŠMT(CZ) LO1409; GA ČR GA16-22092S; GA ČR GA18-17834S; GA ČR GA18-09347S
Institucionální podpora: RVO:68378271
Klíčová slova: magnetron sputtering * noble gases * discharge * radicals * ions * contamination * mass spectrometry
Obor OECD: Fluids and plasma physics (including surface physics)
https://novapublishers.com/shop/horizons-in-world-physics-volume-297/

The chapter deals with mass spectrometric characterization of atoms, radicals and ions in magnetron sputtering discharges generated in Ne, Ar, Kr and Xe gases. In these discharges, different kinds of species such as gas and metal atoms, radicals, negative and positive ions according to the magnetron target and the kind of sputtering gas used are generated. The amount of individual species and ion energy distribution functions as a function of the sputtering gas pressure and the magnetron power are investigated in detail.
Trvalý link: http://hdl.handle.net/11104/0302782