Simple non-destructive method of ultrathin film material properties and generated internal stress determination using microcantilevers immersed in air

0511050 - FZÚ 2020 RIV CH eng J - Článek v odborném periodiku
Stachiv, Ivo - Gan, L.F.
Simple non-destructive method of ultrathin film material properties and generated internal stress determination using microcantilevers immersed in air.
Coatings. Roč. 9, č. 8 (2019), s. 1-14, č. článku 486. E-ISSN 2079-6412
Grant CEP: GA MŠMT(CZ) EF16_019/0000760
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271
Klíčová slova: thin film * atomic layer deposition * nanomechanics * Young's modulus * shear modulus * resonant frequency * Q-factor * microcantilevers * internal stress
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 2.436, rok: 2019
Způsob publikování: Open access

Recent progress in nanotechnology has enabled to design the advanced functional micro-/nanostructures utilizing the unique properties of ultrathin films. To ensure these structures can reach the expected functionality, it is necessary to know the density, generated internal stress and the material properties of prepared films.

Trvalý link: http://hdl.handle.net/11104/0301395