0507875 - FZÚ 2020 RIV US eng J - Článek v odborném periodiku
Varga, Marián - Potocký, Štěpán - Domonkos, Mária - Ižák, Tibor - Babchenko, Oleg - Kromka, Alexander
Great variety of man-made porous diamond structures: pulsed microwave cold plasma system with a linear antenna arrangement.
ACS Omega. Roč. 4, č. 5 (2019), s. 8441-8450. ISSN 2470-1343. E-ISSN 2470-1343
Grant CEP: GA MZd(CZ) NV15-33018A; GA ČR GF16-34856L; GA MŠMT EF16_019/0000760
Grant ostatní: OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institucionální podpora: RVO:68378271
Klíčová slova: pulsed microwave cold plasma system with a linear antenna arrangement * porous diamond structures
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 2.870, rok: 2019 ; AIS: 0.573, rok: 2019
Způsob publikování: Open access
DOI: https://doi.org/10.1021/acsomega.9b00323

Synthetic diamond films are routinely grown using chemical vapor deposition (CVD) techniques. This study reviews the fabrication of various porous diamond-based structures using linear antenna microwave plasma (LAMWP) CVD, a low-cost technology for growing diamond films over a large area at low pressure and at low temperature. From a technological point of view, 2 different approaches, i.e., templated diamond growth using 3 different prestructured porous substrates and direct bottom-up growth of ultra-nanoporous diamond films, are successfully employed to form diamond-based structures with controlled porosity and an enhanced surface area. As a bottom-up strategy, the LAMWP CVD system allows diamond growth at as high as 80% CO2 in the CH4/CO2/H2 gas mixture. In summary, the low-pressure and cold plasma conditions in the LAMWP system facilitate the growth on 3D prestructured substrates of various materials that naturally form porous self-standing diamond structures.
Trvalý link: http://hdl.handle.net/11104/0298832