Fast Forecasting of VGF Crystal Growth Process by Dynamic Neural Networks

0505764 - ÚI 2020 RIV NL eng J - Článek v odborném periodiku
Dropka, N. - Holeňa, Martin - Ecklebe, S. - Frank-Rotsch, C. - Winkler, J.
Fast Forecasting of VGF Crystal Growth Process by Dynamic Neural Networks.
Journal of Crystal Growth. Roč. 521, 1 September (2019), s. 9-14. ISSN 0022-0248. E-ISSN 1873-5002
Grant CEP: GA ČR(CZ) GA18-18080S
Institucionální podpora: RVO:67985807
Klíčová slova: Computer simulation * Fluid flows * Gradient freeze technique
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 1.632, rok: 2019
Způsob publikování: Omezený přístup
http://dx.doi.org/10.1016/j.jcrysgro.2019.05.022

Fast forecasting of process variables during the crystal growth is a critical step in a process development, optimization and control. The common approach based on computational fluid dynamics modeling is accurate, but too slow to deliver results in real time. Here we conducted a feasibility study on the application of dynamic artificial neural networks in the forecasting of VGF-GaAs crystal growth cooling program. Particularly, we studied various Nonlinear-AutoRegressive artificial neural networks with eXogenous inputs (NARX) with 2 external inputs and 6 outputs derived from 500 transient data sets. Data were generated by transient 1D CFD simulation. The first encouraging results are presented and the pros and cons of the application of dynamic artificial neural networks for the fast predictions of VGF process parameters are discussed.
Trvalý link: http://hdl.handle.net/11104/0297153