On the importance of combined scratch/acoustic emission test evaluation: SiC and SiCN thin films case study

0497492 - FZÚ 2019 RIV CH eng J - Článek v odborném periodiku
Tomaštik, J. - Čtvrtlík, Radim - Dráb, M. - Maňák, Jan
On the importance of combined scratch/acoustic emission test evaluation: SiC and SiCN thin films case study.
Coatings. Roč. 8, č. 5 (2018), s. 1-15, č. článku 196. E-ISSN 2079-6412
Grant CEP: GA MŠMT LM2015087
Institucionální podpora: RVO:68378271
Klíčová slova: scratch test * acoustic emission * thin films * silicon carbide
Obor OECD: Ceramics
Impakt faktor: 2.330, rok: 2018

The scratch test, as probably the most widespread technique for assessment of the adhesive/cohesive properties of a film–substrate system, fully depends on reliable evaluation based on assessment of critical loads for systems’ failures. Traditionally used evaluation methods (depth change record and visual observation) may sometimes give misleading conclusions about the failure dynamics, especially in the case of opaque films. Therefore, there is a need for another independent evaluation technique with the potential to complete the existing approaches. The nondestructive method of acoustic emission, which detects the elastic waves emitted during film cracking and delamination, can be regarded as a convenient candidate for such a role even at nano/micro scale.
Trvalý link: http://hdl.handle.net/11104/0290064