Polycrystalline diamond films for optical and photonic applications

0496538 - FZÚ 2019 CZ eng A - Abstrakt
Varga, Marián - Ondič, Lukáš - Hruška, Karel - Fait, Jan - Domonkos, Mária - Prajzler, V. - Potocký, Štěpán - Remeš, Zdeněk - Kromka, Alexander
Polycrystalline diamond films for optical and photonic applications.
NANOCON 2017 - Book of Abstracts. Ostrava: Tanger Ltd, 2017 - (Shrbená, J.). ISBN 978-80-87294-78-9.
[NANOCON 2017. International Conference on Nanomaterials - Research & Application /9./. 18.10.2017-20.10.2017, Brno]
Grant CEP: GA ČR GJ16-09692Y; GA MŠMT(CZ) LD15003
Institucionální podpora: RVO:68378271
Klíčová slova: diamond film * optical elements
Obor OECD: Optics (including laser optics and quantum optics)

Synthetic polycrystalline diamond films are routinely grown over the world not only for basic research but also for industrial uses in many different fields including optics and photonics. Optically tailored diamond films are usually grown by microwave plasma chemical vapor deposition (MWCVD) reactors. Here we will present two unique MWCVD reactors for diamond films synthesis: i) focused MW plasma with ellipsoidal cavity resonator and ii) pulsed MW plasma with linear antenna arrangement. Both these CVD reactors can be operated in complementary process parameters, i.e. high vs. low pressure (10 kPa vs. 10 Pa), high vs. low substrate temperature (900 °C vs. 250 °C) or small vs. large deposition area (9 cm2 vs. 600 cm2). Moreover, they offer a broad variety of complementary deposition conditions which allow us to grow diamond films of required properties (pure intrinsic vs. containing optically active color centers) on flat, 3D and periodically structured substrates.
Trvalý link: http://hdl.handle.net/11104/0289293