Real time observation of strain in the SEM sample

0494370 - ÚPT 2019 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Piňos, Jakub - Frank, Luděk
Real time observation of strain in the SEM sample.
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. Brno: Institute of Scientific Instruments The Czech Academy of Sciences, 2018, s. 58-59. ISBN 978-80-87441-23-7.
[Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Skalský dvůr (CZ), 04.06.2018-08.06.2018]
Institucionální podpora: RVO:68081731
Klíčová slova: SEM * SLEEM * deformation
Obor OECD: Materials engineering

The SEM with various detector arrangements and analytical attachments represents an
irreplaceable tool in material research. One of the techniques available in most contemporary
microscopes is the scanning low energy electron microscopy (SLEEM) with biased specimen, marketed as the beam deceleration mode, gentle beam and others. The SLEEM allows
controlling the information depth of the backscatter electron (BSE) imaging within a wide
range by altering the landing energy of electrons.
Trvalý link: http://hdl.handle.net/11104/0287626