Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties

0490103 - FZÚ 2019 RIV DE eng J - Článek v odborném periodiku
Písařík, Petr - Mikšovský, Jan - Remsa, Jan - Zemek, Josef - Tolde, Z. - Jelínek, Miroslav
Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties.
Applied Physics A - Materials Science & Processing. Roč. 124, č. 1 (2018), s. 1-9, č. článku 85. ISSN 0947-8396. E-ISSN 1432-0630
Grant CEP: GA MŠMT(CZ) LO1409; GA ČR(CZ) GA15-05864S
Institucionální podpora: RVO:68378271
Klíčová slova: diamond-like carbon * thin layers * PLD * ion bombardment
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 1.784, rok: 2018
Způsob publikování: Omezený přístup
https://doi.org/10.1007/s00339-017-1501-5

Diamond-like carbon (DLC) and titanium-doped DLC thin films were prepared by unique hybrid system consisting of pulsed laser deposition, ion source (bombardment) and magnetron sputtering. The influence of deposition parameters (ion energies, deposition pressures and magnetron power) on composition and physical properties was studied. Composition and sp(3)/sp(2) ratio were determined by XPS. sp(3)/sp(2) ratio was in the range from 1.4 to 2.2 for undoped DLC and from 3.4 to 4.8 for Ti-DLC. AFM showed that the layers were smooth, but with small amounts of random droplets. The measurements of the contact angle and determination of surface free energy were made for water, diiodomethane and ethylene glycol.
Trvalý link: http://hdl.handle.net/11104/0284395