Počet záznamů: 1
Soft x-ray laser ablation mass spectrometry for materials study and nanoscale chemical imaging
- 1.0487367 - FZÚ 2018 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Kuznetsov, I. - Burian, Tomáš - Juha, Libor - Soufli, R. - Filevich, J. - Woolston, M. - Bernstein, E.R. - Crick, D.C. - Carlton, D. - Chao, W. - Anderson, E.H. - Rocca, J.J. - Menoni, C.S.
Soft x-ray laser ablation mass spectrometry for materials study and nanoscale chemical imaging.
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI. Bellingham: SPIE, 2015 - (Menoni, C.; Klisnick, A.), s. 1-9, č. článku 958905. Proceedings of SPIE, 9589. ISBN 978-1-62841-755-5. ISSN 0277-786X.
[X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI. San Diego (US), 12.08.2015-13.08.2015]
Grant CEP: GA ČR(CZ) GAP108/11/1312
Institucionální podpora: RVO:68378271
Klíčová slova: mass spectrometry * laser ablation * compositional imaging * soft x-ray lasers * soft x-ray multilayer optics
Obor OECD: Fluids and plasma physics (including surface physics)
https://spie.org/Publications/Proceedings/Volume/9589?SSO=1
There are significant advantages for using a compact capillary discharge soft x-ray laser (SXRL) with wavelength of 46.9 nm for mass spectrometry applications. The 26.4 eV energy photons provide efficient single-photon ionization while preserving the structure of molecules and clusters. The tens of nanometers absorption depth of the radiation coupled with the focusing of the laser beam to diameter of ∼100 nm result in the ablation of atto-liter scale craters which in turn enable high resolution mass spectral imaging of solid samples. In this paper we describe results on the analysis of composition depth-profiling of multilayer oxide stack and material studies in photoresists, ionic crystals, and magnesium corrosion products using SXRL ablation mass spectrometry, a method first demonstrated by our group. These materials are used in a variety of soft x-ray applications such as detectors, multilayer optics, and many more.
Trvalý link: http://hdl.handle.net/11104/0282036
Počet záznamů: 1