Study of mechanical properites of nanostructured polymer coatings prepared using plasma enhanced chemical vapor deposition

0486368 - ÚJF 2018 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Buršíková, V. - Homola, V. - Peřina, Vratislav
Study of mechanical properites of nanostructured polymer coatings prepared using plasma enhanced chemical vapor deposition.
NANOCON 2015: 7th International Conference on Nanomaterials - Research and Application, Conference Proceedings. Ostrava: TANGER, spol. s r.o., 2015, s. 105-110. ISBN 978-80-87294-63-5.
[7th International Conference on Nanomaterials - Research and Application. Brno (CZ), 14.10.2015-16.10.2015]
Institucionální podpora: RVO:61389005
Klíčová slova: PECVD * hexamethyldisiloxane * mechanical properties
Obor OECD: Fluids and plasma physics (including surface physics)

The aim of the present work was to deposit transparent polymer SiOxCyHz protective coatings from hexamethyldisiloxane/ oxygen mixtures in capacitively coupled glow discharge. The coatings prepared under dusty plasma conditions showed nanocomposite character. Complex characterization of the local mechanical properties was carried out on the prepared samples from nano to microscale using indentation techniques. The coatings were very elastic, they exhibited high elastic recovery and low plastic deformation even at indentation depths approaching the coating thickness.
Trvalý link: http://hdl.handle.net/11104/0281200