Detekce plasticity v tenkých hliníkových vrstvách pomocí bulge testu

0485630 - ÚFM 2018 RIV SK eng C - Konferenční příspěvek (zahraniční konf.)
Holzer, Jakub - Pikálek, Tomáš - Buchta, Zdeněk - Lazar, Josef - Tinoco, H.A. - Chlupová, Alice - Náhlík, Luboš - Sobota, Jaroslav - Fořt, Tomáš - Kruml, Tomáš
Detekce plasticity v tenkých hliníkových vrstvách pomocí bulge testu.
[Detecting plasticity in al thin films by means of bulge test.]
Vrstvy a povlaky 2017. Trenčianská Teplá: M-PRESS s. r. o., 2017, s. 43-48. ISBN 978-80-972133-2-9.
[Vrstvy a povlaky 2017 /16./. Rožnov pod Radhoštěm (CZ), 23.10.2017-24.10.2017]
Grant CEP: GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institucionální podpora: RVO:68081723 ; RVO:68081731
Klíčová slova: Bulge test * thin films * mechanical test
Obor OECD: Nano-processes (applications on nano-scale); Nano-processes (applications on nano-scale) (UFM-A); Nano-processes (applications on nano-scale) (UPT-D)

The Bulge test proved to be a useful tool for measuring elastic properties of thin films and
free standing membranes, particularly Young’s modulus and residual stress. The basic principle
of bulge test is application of differential pressure on one side of the a membrane, measurement of
the shape of bulged surface as a function of pressure, in this case via laser interferometer, and
evaluation of a pressure-deflection relationship. In this study, bilayer membrane consisting of a
silicon nitride supporting layer and an aluminium layer deposited by means of magnetron
sputtering is subjected to the bulge test. The results clearly show signs of a non-linear behavior
that is caused by plastic deformation in the aluminium layer. Finite element analysis is being
developed to describe this behavior because analytical model using deflection of central point and
pressure relation falls apart in case of non-linearity.
Trvalý link: http://hdl.handle.net/11104/0280585