Active frequency tuning of the cantilever nanoresonator utilizing a phase transformation of NiTi thin film

0483366 - FZÚ 2018 RIV LT eng J - Článek v odborném periodiku
Stachiv, Ivo - Šittner, Petr - Jeng, Y.-R. - Vokoun, David
Active frequency tuning of the cantilever nanoresonator utilizing a phase transformation of NiTi thin film.
Journal of Vibroengineering. Roč. 19, č. 7 (2017), s. 5161-5169. ISSN 1392-8716
Grant CEP: GA ČR GC15-13174J
Institucionální podpora: RVO:68378271
Klíčová slova: nanoresonator * resonant frequency * thin film * smart memory alloys * NiTi film
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 0.398, rok: 2016

Due to their small sizes, compactness, low cost, high sensitivity, high resolution and extraordinary physical properties, nanoresonators have attracted a widespread attention from the scientific community. It is required that the nanoresonators can operate at desired but adjustable resonant frequencies. In this work, we present a novel active frequency tuning method utilizing a large change of the Young's modulus (more than 50 %) and generated interlayer stress (up a few hundred of MPa) during a phase transformation of NiTi thin film deposited on an elastic substrate. We show that this tuning mechanism can allow one to achieve the extraordinary high fundamental resonant frequency tunability (~30 %). The impact of NiTi film thickness and dimensions on the first three consecutive resonant frequencies of the cantilever nanobeam is examined.
Trvalý link: http://hdl.handle.net/11104/0278713