Exploiting NiTi shape memory alloy films in design of tunable high frequency microcantilever resonators

0483361 - FZÚ 2018 RIV US eng J - Článek v odborném periodiku
Stachiv, Ivo - Šittner, Petr - Olejníček, Jiří - Landa, M. - Heller, Luděk
Exploiting NiTi shape memory alloy films in design of tunable high frequency microcantilever resonators.
Applied Physics Letters. Roč. 111, č. 21 (2017), s. 1-5, č. článku 213105. ISSN 0003-6951. E-ISSN 1077-3118
Grant CEP: GA ČR GC15-13174J
Institucionální podpora: RVO:68378271
Klíčová slova: equipment and apparatus * microactuators * smart materials * continuum mechanics * sensors
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
Impakt faktor: 3.495, rok: 2017

Shape memory alloy (SMA) films are very attractive materials for microactuators because of their high energy density. However, all currently developed SMA actuators utilize martensitic transformation activated by periodically generated heating and cooling, therefore, they have a slow actuation speed, just a few Hz, which restricts their use in most of the nanotechnology applications such as high frequency microcantilever based physical and chemical sensors, atomic force microscopes, or RF filters. Here, we design tunable high frequency SMA microcantilevers for nanotechnology applications. They consist of a phase transforming NiTi SMA film sputtered on the common elastic substrate material, in our case, it is a single-crystal silicon.
Trvalý link: http://hdl.handle.net/11104/0278710