Very low energy STEM / TOF system

0481149 - ÚPT 2018 AT eng A - Abstrakt
Daniel, Benjamin - Radlička, Tomáš - Piňos, Jakub - Frank, Luděk - Müllerová, Ilona
Very low energy STEM / TOF system.
Sources, Interaction with Matter, Detection and Analysis of Low Energy Electrons (SIMDALEE2017). Book of Abstracts. Wien: Technische Universitaet Wien, 2017. s. 70.
[SIMDALEE2017. Sources, Interaction with Matter, Detection and Analysis of Low Energy Electrons. 18.09.2017-22.09.2017, Pula]
GRANT EU: European Commission(XE) 606988 - SIMDALEE2
Institucionální podpora: RVO:68081731
Klíčová slova: STEM/TOF system * ultrathin films * UHV SLEEM
Obor OECD: Electrical and electronic engineering

Scanning low energy electron microscopes (SLEEMs) have been built at ISI for more than 25 years, either by modification of available SEMs, or completely self-built.
High resolution imaging is possible even below 100 eV electron landing energy, and in principle the energy can be decreased down to 0 eV. A more recent development is the use of a detector for transmitted electrons
(TE) for samples below 10 nm thickness, i.e. ultrathin films and 2D materials like graphene or MoS2. These TE detection capabilities will be enhanced even further with the completion of a new UHV SLEEM with a time-offlight (TOF) energy analyzer optimized for electron energies below 100 eV.
Trvalý link: http://hdl.handle.net/11104/0276755