Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source

0478129 - FZÚ 2018 RIV US eng J - Článek v odborném periodiku
Hara, H. - Arai, G. - Dinh, T.H. - Jiang, W. - Miura, T. - Endo, Akira - Ejima, T. - Li, B. - Dunne, P. - O'Sullivan, G. - Sunahara, A. - Higashiguchi, T.
Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source.
Journal of Applied Physics. Roč. 118, č. 19 (2015), s. 1-7, č. článku 193301. ISSN 0021-8979. E-ISSN 1089-7550
Institucionální podpora: RVO:68378271
Klíčová slova: laser-produced plasmas * 4D-4F emissions resonances * collisions * dynamics
Obor OECD: Optics (including laser optics and quantum optics)
Impakt faktor: 2.101, rok: 2015

The extreme ultraviolet (EUV) emission and its spatial distribution as well as plasma parameters in a microplasma high-brightness light source are characterized by the use of a two-dimensional radiation hydrodynamic simulation. The expected EUV source size, which is determined by the expansion of the microplasma due to hydrodynamic motion, was evaluated to be 16 mu m (full width) and was almost reproduced by the experimental result which showed an emission source diameter of 18-20 mu m at a laser pulse duration of 150 ps [full width at half-maximum].
Trvalý link: http://hdl.handle.net/11104/0274345