Very smooth FeSb.sub.2./sub.Te and Ce.sub.0.1./sub.Fe.sub.0.7./sub.Co.sub.3.3./sub.Sb.sub.12./sub. layers prepared by modified PLD

0469322 - FZÚ 2017 RIV US eng J - Článek v odborném periodiku
Remsa, Jan - Jelínek, Miroslav - Kocourek, Tomáš - Zeipl, Radek - Navrátil, Jiří
Very smooth FeSb₂Te and Ce_0.1Fe_0.7Co_3.3Sb₁₂ layers prepared by modified PLD.
Journal of Electronic Materials. Roč. 45, č. 3 (2016), s. 1921-1926. ISSN 0361-5235. E-ISSN 1543-186X
Grant CEP: GA ČR(CZ) GA13-33056S
Institucionální podpora: RVO:68378271 ; RVO:61389013
Klíčová slova: PLD * RTA * thermoelectric layer * Harman * FeSb₂Te * Ce_0.1Fe_0.7Co_3.3Sb₁₂
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus; CD - Makromolekulární chemie (UMCH-V)
Impakt faktor: 1.579, rok: 2016

We report on the preparation of thermoelectric layers of FeSb2Te and Ce0.1Fe0.7Co3.3Sb12 on silicon (100) and fused silica substrates via a combination of pulsed laser deposition (PLD) and rapid thermal annealing methods. A wide range of deposition conditions were tested including on-and off-axis approaches and variation of the annealing temperature profile. Wavelength dispersive x-ray spectroscopy was used to determine stoichiometry. An optical microscope, mechanical profilometer, and atomic force microscopy served to map layer topology. For the FeSb2Te layers, Sa was between 1.4 nm and 6 nm, with Sq ranging from 2.1 nm to 7.8 nm. For Ce0.1Fe0.7Co3.3Sb12 layers, Sa was from 1.3 nm to 4.2 nm and Sq between 1.7 nm and 6.2 nm. Crystalline structure was determined by x-ray diffraction. The best layers (in terms of smooth surface and crystalline structure) prepared using a modified off-axis PLD arrangement were then characterized for thermoelectric properties.
Trvalý link: http://hdl.handle.net/11104/0267121