Počet záznamů: 1
Coordinate interferometric measuring system for positioning of a sample in electron-beam writer
- 1.0467527 - ÚPT 2017 PL eng A - Abstrakt
Lazar, Josef - Holá, Miroslava - Hrabina, Jan - Oulehla, Jindřich - Číp, Ondřej - Valtr, M. - Klapetek, P.
Coordinate interferometric measuring system for positioning of a sample in electron-beam writer.
NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. Wroclaw: Wroclaw University of Technology, 2016.
[NanoScale 2016. Seminar on Quantitative Microscopy (QM) /11./ and Seminar on Nanoscale Calibration Standards and Methods /7./. 09.03.2016-11.03.2016, Wroclaw]
Institucionální podpora: RVO:68081731
Klíčová slova: SPM * nanometrology * nanoscale * nanopositioning interferometry
Kód oboru RIV: BH - Optika, masery a lasery
The short-range scanning probe microscope (SPM) system developed in cooperation between Institute of Scientific Instruments (ISI) and Czech Metrology Institute (CMI) has been modified by new interferometers developed at ISI.
Trvalý link: http://hdl.handle.net/11104/0265623
Počet záznamů: 1