Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides

0467513 - FZÚ 2017 RIV CH eng J - Článek v odborném periodiku
Remeš, Zdeněk - Babchenko, Oleg - Varga, Marián - Stuchlík, Jiří - Jirásek, Vít - Prajzler, Václav - Nekvindová, P. - Kromka, Alexander
Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides.
Thin Solid Films. Roč. 618, Nov (2016), s. 130-133. ISSN 0040-6090. E-ISSN 1879-2731
Grant CEP: GA ČR(CZ) GA14-05053S
Grant ostatní: AV ČR(CZ) MOST-15-04
Program: Bilaterální spolupráce
Institucionální podpora: RVO:68378271
Klíčová slova: hydrogenated amorphous silicon * nanocrystalline diamond * planar waveguides
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.879, rok: 2016

The high index of refraction planar optical waveguides operating in the near infrared spectrum were prepared from the intrinsic a-Si:H layer coated by NCD. The a-Si:H layers were grown by radio frequency plasma enhanced chemical vapor deposition on glass substrates from silane and hydrogen mixture at the substrate temperature about 250°C followed at 210°C by the NCD coating grown by the microwave plasma enhanced chemical vapor deposition from hydrogen rich plasma with adding methane and carbon dioxide at the substrate temperature. The optical absorptance spectra, Raman spectra and scanning electron microscopy reveal the diamond character of the NCD coatings as well as the stability of a-Si:H layer during NCD deposition. The FEM simulations show that the near infrared optical absorption coefficient of the NCD coating must be reduced below 10/cm to reduce the optical attenuation below 1 dB/cm in the planar waveguide with the 50 nm thick NCD coating.

Trvalý link: http://hdl.handle.net/11104/0265610