Structural Colors of Self-Similar Nano Patterns

0464386 - ÚPT 2018 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Meluzín, Petr - Horáček, Miroslav - Krátký, Stanislav - Kolařík, Vladimír
Structural Colors of Self-Similar Nano Patterns.
NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. Ostrava: Tanger, 2017, s. 703-708. ISBN 978-80-87294-71-0.
[NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./. Brno (CZ), 19.10.2016-21.10.2016]
Grant CEP: GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institucionální podpora: RVO:68081731
Klíčová slova: e-beam writer * nano patterning * self similarity * diffraction grating
Obor OECD: Optics (including laser optics and quantum optics)

E-beam lithography is a flexible technology for various diffraction gratings origination. The e-beam patterning typically allows for the creation of optical diffraction gratings in the first diffraction order. However, the very high resolution enables also the patterning of structures providing the zero-order diffraction. Recently, we presented a work on the structural colors of metallic layers covering both regular-line structures and CGH (computer generated hologram) structures. This work presents a study dealing with zero-order diffraction structures with self-similar properties. The practical part of the work is focused on two aspects: design parameters and technological issues. Variations in design parameters include the tone of the structure (positive or negative),
the density of filling, the filling factor, and the depth of the structures. The achieved gamut of colors may by primarily extended by the proper selection of metal deposition technology and its parameters, and further by the proper selection of the metal and the thickness of its layer, these are the technological issues.
Trvalý link: http://hdl.handle.net/11104/0270767