Structural, optical and mechanical properties of thin diamond and silicon carbide layers grown by low pressure microwave linear antenna plasma enhanced chemical vapour deposition

0464041 - FZÚ 2017 RIV CH eng J - Článek v odborném periodiku
Taylor, Andrew - Drahokoupil, Jan - Fekete, Ladislav - Klimša, Ladislav - Kopeček, Jaromír - Purkrt, Adam - Remeš, Zdeněk - Čtvrtlík, Radim - Tomáštík, Jan - Frank, Otakar - Janíček, P. - Mistrík, J. - Mortet, Vincent
Structural, optical and mechanical properties of thin diamond and silicon carbide layers grown by low pressure microwave linear antenna plasma enhanced chemical vapour deposition.
Diamond and Related Materials. Roč. 69, Oct (2016), s. 13-18. ISSN 0925-9635. E-ISSN 1879-0062
Grant CEP: GA MŠMT LO1409; GA TA ČR TA03010743; GA ČR GA13-31783S; GA MŠMT(CZ) LD14011; GA AV ČR(CZ) Fellowship J. E. Purkyně; GA MŠMT LM2015088
Grant ostatní: FUNBIO(XE) CZ.2.16/3.1.00/21568; AV ČR(CZ) Fellowship J. E. Purkyně
Program: Fellowship J. E. Purkyně
Institucionální podpora: RVO:68378271 ; RVO:61388955
Klíčová slova: diamond * silicon carbide * adherence * mechanical properties * optical properties
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus; CG - Elektrochemie (UFCH-W)
Impakt faktor: 2.561, rok: 2016

In thiswork,we detail the properties of thin silicon carbide and polycrystalline diamond layers grown by microwave plasma enhanced chemical vapour depositionwith linear antenna delivery. Structural, mechanical and optical properties are compared for their potential use as transparent hard coatings. Silicon carbide layers exhibit mechanical properties comparable to thin diamond layers butwith a significantly higher adhesion and lower optical absorption coefficient over a wide spectral range.
Trvalý link: http://hdl.handle.net/11104/0263369