Deposition of Hard Yet Moderately Ductile MoBC Coatings by p-DC Magnetron Sputtering

0463465 - ÚFM 2017 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Souček, P. - Buršíková, V. - Zábranský, L. - Buršík, Jiří - Vašina, P.
Deposition of Hard Yet Moderately Ductile MoBC Coatings by p-DC Magnetron Sputtering.
Potential Application of Plasma and Nanomaterials 2015: Book of Contributed Papers. Brno: Masarykova Univerzita, 2015, s. 68-71. ISBN 978-80-210-8053-9.
[PAPN 2015 - Potential Application of Plasma and Nanomaterials 2015. Brno (CZ), 12.11.2015-13.11.2015]
Grant CEP: GA ČR(CZ) GA15-17875S
Institucionální podpora: RVO:68081723
Klíčová slova: magnetron sputtering * ion flux * nanolaminates
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech

Novel nanolaminated MoBC coatings were prepared using a combination of non-reactive direct current and pulsed direct current magnetron sputtering. Depending on the deposition conditions the coatings were either of amorphous or of nanocomposite nature. Nanocomposite coatings showed good hardness and Young’s modulus and showed no tendency to form cracks even for high-load nanoindentation testing.
Trvalý link: http://hdl.handle.net/11104/0262957