Preparation and optical properties of nanocrystalline diamond films for the infrared planar waveguides

0451970 - FZÚ 2016 TW eng A - Abstrakt
Remeš, Zdeněk - Purkrt, Adam - Babchenko, Oleg - Varga, Marián - Stuchlík, Jiří - Kromka, Alexander - Jirásek, Vít - Prajzler, Václav - Nekvindová, P.
Preparation and optical properties of nanocrystalline diamond films for the infrared planar waveguides.
International Thin Films Conference TACT 2015. Tainan: Taiwan Association for Coatings and Thin Films Technology (TACT), 2015 - (Jenq-Gong, D.). s. 305-305
[International Thin Films Conference TACT 2015. 15.11.2015-18.11.2015, Tainan]
Grant CEP: GA ČR(CZ) GA14-05053S
Grant ostatní: AV ČR(CZ) MOST-15-04
Program: Bilaterální spolupráce
Institucionální podpora: RVO:68378271
Klíčová slova: nanocrystalline diamond * hydrogenated amorphous silicon
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

The NCD quality is characterized by the Raman spectroscopy, the surface morphology by SEM and AFM. The film thickness and the surface roughness are evaluated from reflectance spectra. Since the NCD exhibit a characteristic shape of the subgap optical absorption in the visible spectral region that scales with the content of amorphous carbon phase at grain boundaries [4], the optical quality is evaluated from photothermal deflection spectroscopy (PDS). The optical wave propagation is simulated in COMSOL Multiphysics® Modeling Software.
Trvalý link: http://hdl.handle.net/11104/0253032