Laser micromachining of glass, silicon, and ceramics

0449555 - FZÚ 2016 RIV US eng J - Článek v odborném periodiku
Řiháková, L. - Chmelíčková, Hana
Laser micromachining of glass, silicon, and ceramics.
Advances in Materials Science and Engineering. Roč. 2015, Feb (2015), s. 584952. ISSN 1687-8434. E-ISSN 1687-8442
Institucionální podpora: RVO:68378271
Klíčová slova: laser micromachining of materials * laser material treatment
Obor OECD: Materials engineering
Impakt faktor: 1.010, rok: 2015
Způsob publikování: Open access

A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, and automotive industries, communication, and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon, and ceramics is considered. Interaction of these materials with laser radiation and recent research held on laser material treatment is provided.
Trvalý link: http://hdl.handle.net/11104/0251085