EUV ablation of organic polymers at a high fluence

0441280 - FZÚ 2015 RIV GB eng J - Článek v odborném periodiku
Liberatore, Chiara - Mann, K. - Müller, M. - Pina, L. - Juha, Libor - Rocca, J.J. - Endo, Akira - Mocek, Tomáš
EUV ablation of organic polymers at a high fluence.
High Power Laser Science and Engineering. Roč. 2, e26 (2014), s. 1-5. ISSN 2095-4719. E-ISSN 2052-3289
Grant CEP: GA MŠMT ED2.1.00/01.0027; GA MŠMT EE2.3.20.0143
Grant ostatní: HILASE(XE) CZ.1.05/2.1.00/01.0027; OP VK 6(XE) CZ.1.07/2.3.00/20.0143
Institucionální podpora: RVO:68378271
Klíčová slova: EUV ablation * organic polymer * photo-erosion mechanisms * wavelength effect
Kód oboru RIV: BH - Optika, masery a lasery

A preliminary investigation on short-wavelength ablation mechanisms of poly(methyl methacrylate) (PMMA) and poly (1,4-phenylene ether ether-sulfone) (PPEES) by extreme ultraviolet (EUV) radiation at 13.5 nm using a table-top laser-produced plasma from a gas-puff target at LLG (Göttingen) and at 46.9 nm by a 10 Hz desktop capillary discharge laser operated at the Institute of Physics (Prague) is presented. Ablation of polymer materials is initiated by photo-induced polymer chain scissions.
Trvalý link: http://hdl.handle.net/11104/0244306