Advanced interferometry systems for dimensional measurement in nanometrology

0441274 - ÚPT 2016 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Lazar, Josef - Holá, Miroslava - Hrabina, Jan - Oulehla, Jindřich - Číp, Ondřej - Vychodil, M. - Sedlář, P. - Provazník, M.
Advanced interferometry systems for dimensional measurement in nanometrology.
Optics and Measurement Conference 2014 (Proceedings of SPIE 9442). Bellingham: SPIE, 2014, 94420P: 1-6. ISBN 9781628415575. ISSN 0277-786X.
[Optics and Measurement Conference 2014 (OaM 2014). Liberec (CZ), 07.10.2014-10.10.2014]
Grant CEP: GA ČR GB14-36681G; GA TA ČR TA02010711; GA TA ČR TA01010995; GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institucionální podpora: RVO:68081731
Klíčová slova: interferometry * highly-coherent lasers * signal processing
Kód oboru RIV: BH - Optika, masery a lasery

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (ISI) of the Academy of Sciences of the Czech Republic and a company Meopta – optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta – optika. The main aim of the project is a design of a complex interferometric measuring system in a form of a prototype serving as a master for further production. It concept is a modular family of components configurable for various arrangements primarily for multi-axis measurements in nanotechnology and surface inspection. Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta – optika contributes with development of new technology together with a design of a machine for processing and polishing of high-precision flat-surface optical components.
Trvalý link: http://hdl.handle.net/11104/0246973