White-light interferometry with high measurement speed

0440855 - FZÚ 2015 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Pavlíček, Pavel - Svak, V.
White-light interferometry with high measurement speed.
Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics /19./. Bellingham: SPIE, 2014 - (Popiolek-Masajada, A.; Urbanczyk, W.), "944115-1"-"944115-7". Proceedings of SPIE, 9441. ISBN 9781628415568. ISSN 0277-786X.
[Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics /19./. Jelenia Góra (PL), 08.09.2014-12.09.2014]
Grant CEP: GA ČR GA13-12301S
Institucionální podpora: RVO:68378271
Klíčová slova: white-light interferometry * high measurement speed * undersampling * Hilbert transform
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

White-light interferometry is an established and proven method for the measurement of the shape of objects. White-light interferometry is able to measure the shape of objects with optically smooth as well as optically rough surfaces. A major disadvantage of white-light interferometry is its low scanning velocity and the long measurement time related. We present a system that measures the shape of object with optically rough surface and can achieve the scanning velocity up to 100 μm/s with a standard frame rate of 25 Hz. The experimental results are shown.
Trvalý link: http://hdl.handle.net/11104/0243949