Time-resolved tuned diode laser absorption spectroscopy of pulsed plasma

0439672 - FZÚ 2015 RIV GB eng C - Konferenční příspěvek (zahraniční konf.)
Adámek, Petr - Do, H.T. - Čada, Martin - Hubička, Zdeněk - Hippler, R.
Time-resolved tuned diode laser absorption spectroscopy of pulsed plasma.
Journal of Physics: Conference Series. Vol. 511. Bristol: IOP Publishing, 2014, "012088-1"-"012088-6". IOPscience, 511. ISSN 1742-6596.
[International Congress on Plasma Physics (ICPP) / 13th Latin American Workshop on Plasma Physics (LAWPP)/15./. Santiago, CHILE (CL), 08.08.2010-13.08.2010]
Grant CEP: GA AV ČR KAN301370701; GA ČR GP202/09/P159; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002
Institucionální podpora: RVO:68378271
Klíčová slova: magnetron discharge * aluminum
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech

A novel method for time-resolved tuned diode laser absorption spectroscopy has been developed. In this paper, we describe in detail developed electronic module that controls time-resolution of laser absorption spectroscopy system. The TTL signal triggering plasma pulse is used for generation of two signals: the first one triggers the fine tuning of laser wavelength and second one controls time-defined signal sampling from absorption detector. The described method and electronic system enable us to investigate temporal evolution of sputtered particles in technological low-temperature plasma systems. The pulsed DC planar magnetron sputtering system has been used to verify this method. The 2” in diameter titanium target was sputtered in pure argon atmosphere. The working pressure was held at 2 Pa. All the experiments were carried out for pulse ON time fixed at 100 μs.
Trvalý link: http://hdl.handle.net/11104/0242920