Počet záznamů: 1
Application of pressurized hot water for etching of microfluidics
- 1.0437327 - ÚIACH 2015 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Vašina, M. - Grym, Jakub - Foret, František … celkem 4 autorů
Application of pressurized hot water for etching of microfluidics.
Chemické Listy. Roč. 107, Issue s3.. Praha: Česká společnost chemická, 2013, s. 333-334. ISSN 0009-2770. E-ISSN 1213-7103.
[CECE Junior 2013. Brno (CZ), 12.11.2013-13.11.2013]
Institucionální podpora: RVO:68081715
Klíčová slova: microfluidics * pressurized hot water
Kód oboru RIV: CB - Analytická chemie, separace
The subject of this study is a new method of glass etching and its application in microfluidics. Commonly, hydrofluoric acid is used for glass etching. In this study we have tested a new method of glass etching using pressurized hot water. Test motives were prepared using photolitography and metal sputtering on the glass substrate and the etching was performed in a newly developed device capable to compress and heat water to its critical point. Electron microscopy and profilometry have been used for analyzing the surface of the etched glass substrate.
Trvalý link: http://hdl.handle.net/11104/0240941
Počet záznamů: 1