Aging of nanocluster Ti/TiOx films prepared by means of gas aggregation cluster source

0436570 - ÚFE 2015 RIV CH eng J - Článek v odborném periodiku
Drábik, M. - Choukourov, A. - Artemenko, A. - Matoušek, J. - Polonskyi, O. - Solař, P. - Pešička, J. - Lorinčík, Jan - Slavínská, D. - Biederman, H.
Aging of nanocluster Ti/TiOx films prepared by means of gas aggregation cluster source.
Surface and Coatings Technology. Roč. 205, SUPPL. 2 (2011), S48-S52. ISSN 0257-8972.
[12th International Conference on Plasma Surface Engineering. Garmisch-Partenkirchen, 13.09.2010-17.09.2010]
Výzkumný záměr: CEZ:AV0Z20670512
Klíčová slova: Aging * Cluster source * Oxidation
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
Impakt faktor: 1.867, rok: 2011

Nanocluster films composed of Ti and TiOx were prepared using a gas aggregation cluster source. The films were first characterized immediately after their preparation and afterwards were allowed to oxidize in air at room temperature for a given time to study their aging. Selected nanocluster films were annealed at 420 degrees C in air for 1 h. The prepared nanocluster films were studied by a variety of methods in order to fully characterize their properties. Transmission electron microscopy (TEM) was utilized to determine size of the clusters. Chemical composition of the films was determined by X-ray Photoelectron Spectroscopy (XPS) and secondary ion mass spectrometry (SIMS). Optical properties were studied using ultraviolet-visible spectroscopy (UV-vis). Special attention was paid to the description of oxidation of the titanium nanoclusters and other changes in the films connected with aging
Trvalý link: http://hdl.handle.net/11104/0240268