High power impulse magnetron sputtering of CIGS thin films for high efficiency thin film solar cells

0435174 - FZÚ 2015 RIV CZ eng J - Článek v odborném periodiku
Olejníček, Jiří - Hubička, Zdeněk - Kohout, Michal - Kšírová, Petra - Kment, Štěpán - Brunclíková, Michaela - Čada, Martin - Darveau, S.A. - Exstrom, C.L.
High power impulse magnetron sputtering of CIGS thin films for high efficiency thin film solar cells.
Plasma Physics and Technology. Roč. 1, č. 3 (2014), s. 135-137. ISSN 2336-2626
Grant CEP: GA MŠMT LH12045
Institucionální podpora: RVO:68378271
Klíčová slova: CIGS * HiPIMS * emission spectroscopy * thin films * magnetron sputtering
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
http://fyzika.feld.cvut.cz/misc/ppt/articles/2014/olejnicek.pdf

In this work CuIn1-xGaxSe2 (CIGS) thin films with three different values of x (0; 0.28; 1) were prepared by nonreactive sputtering of Cu, In and Ga in HiPIMS (High Power Impulse Magnetron Sputtering) or DC magnetron and subsequently selenized in an Ar+Se atmosphere. Optical emission spectroscopy (OES) was used to monitor some basic plasma parameters during sputtering of metallic precursors. CIGS thin film characteristics were measured using X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, energy-dispersive X-ray spectroscopy (EDX) and other techniques.
Trvalý link: http://hdl.handle.net/11104/0239059