In-beam tracking refractometry for coordinate interferometric measurement

0434169 - ÚPT 2015 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Holá, Miroslava - Lazar, Josef - Číp, Ondřej - Buchta, Zdeněk
In-beam tracking refractometry for coordinate interferometric measurement.
Optical Micro- and Nanometrology V. (Proceedings of SPIE 9132). Bellingham: SPIE, 2014, 91321K: 1-7. ISSN 0277-786X.
[Optical Micro- and Nanometrology /5./. Brussels (BE), 15.04.2014-17.04.2014]
Grant CEP: GA ČR GPP102/11/P820; GA MŠMT ED0017/01/01; GA MŠMT EE2.4.31.0016; GA TA ČR TA02010711; GA TA ČR TE01020233; GA TA ČR TA01010995; GA MŠMT(CZ) LO1212
Institucionální podpora: RVO:68081731
Klíčová slova: refractometry * refractive index * interferometers * laser interferometry * lasers * scanning probe microscopy
Kód oboru RIV: BH - Optika, masery a lasery

We propose to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. The concept is derived form a tracking refractometry evaluating the refractive index of air in the beam axis coinciding with the positioning interferometer. Application of this approach in multi-axis positioning and measurement mans to compromise the principle of spatial unity of the displacement measuring laser beam and the beam of the tracking refractometer. In this contribution we evaluate the level of uncertainty associated with the spatial shift of these two beams. Consequently the nature of the fluctuations of the refractive index of air in laser interferometry is investigated and discussed with the focus on potential applications in coordinate measuring systems and long-range metrological scanning probe microscopy systems.
Trvalý link: http://hdl.handle.net/11104/0238305