Vapor pressures of (3-dimethylaminopropyl)dimethylindium, (t-butylimino)bis(diethylamino)tantalum cyclopentadienylide, and (t-butylimido)tris(ethylmethylamino)tantalum

0433689 - FZÚ 2015 CH eng A - Abstrakt
Morávek, P. - Pangrác, Jiří - Fulem, M. - Hulicius, Eduard - Růžička, K.
Vapor pressures of (3-dimethylaminopropyl)dimethylindium, (t-butylimino)bis(diethylamino)tantalum cyclopentadienylide, and (t-butylimido)tris(ethylmethylamino)tantalum.
International Conference on Metalorganic Vapor Phase Epitaxy /17./. Lausanne: École Polytechnique Fédérale de Lausanne, 2014 - (Kapon, E.; Rudra, A.). s. 7-7
[International Conference on Metalorganic Vapor Phase Epitaxy /17./. 13.07.2014-18.07.2014, Lausanne]
Institucionální podpora: RVO:68378271
Klíčová slova: metalorganic vapor phase epitaxy * vapor pressure * static method * indium precursors * tantalum precursors
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

Vapor pressures of three metalorganic precursors, [Me2N(CH2)3]Me2In), (t-BuN)(Et2N)2CpTa), and (t-BuN)(EtMeN)3Ta) were measured using the static method in the temperature range from 268 to 323 K. The experimental data were fitted with the Antoine equation. To our knowledge, this is the first study reporting the vapor pressure measurements for (t-BuN)(Et2N)2CpTa and (t-BuN)(EtMeN)3Ta. Fragmentary information on vapor pressure data for [Me2N(CH2)3]Me2In found in the literature are not in accordance with our measurements.
Trvalý link: http://hdl.handle.net/11104/0237855