Tribological properties of nc-TiC/a-C:H coatings prepared by magnetron sputtering at low and high ion bombardment of the growing film

0428200 - ÚJF 2015 RIV CH eng J - Článek v odborném periodiku
Souček, P. - Schmidtová, T. - Bursíková, V. - Vašina, P. - Pei, Y. - De Hos, J. Th. M. - Caha, O. - Peřina, Vratislav - Mikšová, Romana - Malinský, Petr
Tribological properties of nc-TiC/a-C:H coatings prepared by magnetron sputtering at low and high ion bombardment of the growing film.
Surface and Coatings Technology. Roč. 241, FEB (2014), s. 64-73. ISSN 0257-8972
Grant CEP: GA MŠMT(XE) LM2011019; GA ČR(CZ) GD104/09/H080
Institucionální podpora: RVO:61389005
Klíčová slova: nanocomposites * magnetron sputtering * Titanium carbide * ion flux * friction * wear
Kód oboru RIV: BG - Jaderná, atomová a mol. fyzika, urychlovače
Impakt faktor: 1.998, rok: 2014

Two series of nc-TiC/a-C:H coatings were deposited by a hybrid PVD-PECVD process of titanium sputtering in argon/acetylene atmosphere at two configurations of magnetic field resulting in different impinging ion fluxes on the growing film. The composition of the coatings was varied by changing the acetylene gas flow during the depositions. Tribological tests were performed under conditions of emulating dry machining using 100Cr6 steel ball and silicon nitride ball as sliding counterparts. High temperature tribo-tests at 300 degrees C and 500 degrees C were performed with silicon nitride ball counterpart to examine the thermal stability of the coatings deposited at 320 degrees C. Special attention was paid to design coatings with optimal chemical composition for high hardness. The coefficient of friction (CoF) and wear as a function of C/Ti are presented. It is observed that in the range of 1 <C/Ti < 2 the CoF is largely independent of the ion flux during the deposition and is similar to 02-0.3. The CoF then decreases with increasing carbon content up to a certain limit. Highest carbon-containing coating shows an increased CoF and wear. The coatings became strongly oxidized after the high temperature test The CoF for coatings in the high hardness region is stable around 03 for the whole test at 300 degrees C, the CoF at 500 degrees C was stable at similar to 0.2 for the first half of the test and then the coating failed. The coating in the wear tracks was mostly delaminated.
Trvalý link: http://hdl.handle.net/11104/0233606