Počet záznamů: 1
Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets
- 1.0427184 - FZÚ 2015 RIV CH eng J - Článek v odborném periodiku
Kubart, T. - Čada, Martin - Lundin, D. - Hubička, Zdeněk
Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets.
Surface and Coatings Technology. Roč. 238, JAN (2014), s. 152-157. ISSN 0257-8972
Grant CEP: GA MŠMT LD12002; GA ČR GAP108/12/2104; GA MŠMT LH12043
Grant ostatní: AV ČR(CZ) M100101215
Institucionální podpora: RVO:68378271
Klíčová slova: HiPIMS * reactive sputtering * ionized flux fraction
Kód oboru RIV: BL - Fyzika plazmatu a výboje v plynech
Impakt faktor: 1.998, rok: 2014
Ionized metal flux fractions in high power impulsemagnetron sputtering (HiPIMS) were analyzed by a combination of a retarding field analyzer and a quartz crystal microbalance (QCM). Two target materials, Ni and Ti, were studied in an Ar atmosphere. In the case of Ti, the reactive (Ar + O2) mode was also investigated. Ionized metal flux fractions of up to 50% for Ni were observed at a pulse power density of 1 kW cm−2.
Trvalý link: http://hdl.handle.net/11104/0232785
Počet záznamů: 1