Optimization of various technological processes in the fabrication of silicon based layers in SVCS process innovation high-temperature horizontal furnace SV-FUR reactors using multiphysics CFD-ace+ software

0424296 - FZÚ 2014 RIV SK eng C - Konferenční příspěvek (zahraniční konf.)
Jirásek, Vít - Potocký, Štěpán - Sveshnikov, Alexey - Poruba, A.
Optimization of various technological processes in the fabrication of silicon based layers in SVCS process innovation high-temperature horizontal furnace SV-FUR reactors using multiphysics CFD-ace+ software.
Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies). Bratislava: Slovenská vákuová spoločnosť, 2013 - (Vojs, M.; Veselý, M.; Vincze, A.), s. 25-31. ISBN 978-80-971179-2-4.
[School of Vacuum Technology /16./ (Perspektívne vákuové metódy a technológie. Perspective vacuum methods and technologies). Štrbské Pleso (SK), 10.10.2013-13.10.2013]
Grant CEP: GA TA ČR TA01020972
Institucionální podpora: RVO:68378271
Klíčová slova: plasma * CVD processes * Si substrate
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

A fabrication cycle of silicon based layers in semiconductor and PV industry includes several high-temperature processes. While the atmospheric-pressure thermal oxidation and diffusion are used for the SiO2 deposition and phosphorus or boron doping, respectively, the low-pressure CVD or plasma-enhanced CVD processes are used for the preparation of passivation and anti-reflecting coatings. One of the most important requirements in the production is a good homogeneity of the surface film created by the particular reaction process both across the Si wafer and within the whole load. In this contribution will be shown that the multiphysics modelling using the dedicated software package is very helpful in the optimization of process parameters leading not only to better homogeneity, but also to bet terutilization of the process gases, shortening the process time and other benefits, finally leading to an improvement of the manufacturing profitability and competitiveness of the product.
Trvalý link: http://hdl.handle.net/11104/0230383