Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma system

0423252 - FZÚ 2014 AT eng A - Abstrakt
Ižák, Tibor - Sveshnikov, Alexey - Babchenko, Oleg - Demo, Pavel - Kromka, Alexander
Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma system.
International Winterschool on Electronic Properties of Novel Materials /27./. Kirchberg: Kirchberg, 2013 - (Machon, M.; Herziger, F.). s. 95-95
[International Winterschool on Electronic Properties of Novel Materials /27./. 02.03.2013-09.03.2013, Kirchberg]
Grant CEP: GA ČR(CZ) GBP108/12/G108; GA ČR GAP108/12/0891
Institucionální podpora: RVO:68378271
Klíčová slova: nucleation * diamond nuclei * MWCVD * linear antenna plasma system
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

In this work two dierent deposition systems are compared: pulsed-linear antenna (PLAMWP) and focused microwave plasma (FMWP). The eect of pressure, CH4/H2 ratio and CO2 addition was studied. The nucleation density (Nd) typical for non-treated substrates (105 cm 2) was improved by four orders to 109 cm 2 in PLAMWP by increasing of CH4 and CO2. The highest Nd in FMWP was one order lower than in PLAMWP. It is due to dierent plasma character, temperature conditions and surface chemistry. Moreover, in PLAMWP system a bimodal size distribution function of diamond clusters was observed (beside larger clusters also smaller appeared). A possible origin of the bimodal distribution of clusters is discussed, including heterogeneous/ homogenous nucleation and growth kinetics.
Trvalý link: http://hdl.handle.net/11104/0229328