Mechanism of electron-photon conversion in YAG: Ce scintillator for SEM electron detectors

0420839 - ÚPT 2014 DE eng C - Konferenční příspěvek (zahraniční konf.)
Bok, Jan - Schauer, Petr
Mechanism of electron-photon conversion in YAG: Ce scintillator for SEM electron detectors.
Microscopy conference (MC) 2013. Proceedings. Vol. 2. Regensburg: University of Regensburg, 2013, s. 121-122.
[Microscopy Conference 2013. Regensburg (DE), 25.08.2013-30. 08.2013]
Grant CEP: GA MŠMT EE.2.3.20.0103; GA TA ČR TE01020118
Institucionální podpora: RVO:68081731
Klíčová slova: Everhart-Thornley scintillation detector * cathodoluminiscence * image quality
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

The Everhart-Thornley imaging detector is commonly used one in SEM. In such a detector, the signal electrons are accelerated towards a conductively coated scintillator where they are converted to the visible photons within the cathodoluminescence (CL). The emitted photons are guided out of a vacuum chamber and detected by a photon detector. The scintillator is still a bottleneck of the signal electron detector, because its CL properties can highly affect the scanned image quality. For example, low CL efficiency of the scintillator can result in poor signal-to-noise ratio of the detector [1]. Also long CL decay time can decrease the image contrast during the fast scanning [2]. These problems highly motivate to clearly understand how the energy of the signal electron is converted in the scintillator. This knowledge is essential for modification of the scintillator properties in order to improve the SEM image quality
Trvalý link: http://hdl.handle.net/11104/0227361