Interferometric system with tracking refractometry capability in the measuring axis

0399809 - ÚPT 2014 RIV GB eng J - Článek v odborném periodiku
Lazar, Josef - Holá, Miroslava - Číp, Ondřej - Hrabina, Jan - Oulehla, Jindřich
Interferometric system with tracking refractometry capability in the measuring axis.
Measurement Science and Technology. Roč. 24, č. 6 (2013), 067001:1-6. ISSN 0957-0233. E-ISSN 1361-6501
Grant CEP: GA ČR GA102/09/1276; GA ČR GPP102/11/P820; GA TA ČR TE01020233; GA TA ČR TA02010711; GA MŠMT ED0017/01/01
Institucionální podpora: RVO:68081731
Klíčová slova: refractometry * nanopositioning * interferometry * nanometrology
Kód oboru RIV: BH - Optika, masery a lasery
Impakt faktor: 1.352, rok: 2013

We present a combined interferometric arrangement designed for measurement of one-axis displacement over a specified measuring range with mechanical referencing. This concept allows simultaneous measurement of the carriage position from both sides together with monitoring of the overall range. This can be used in configuration with in-line monitoring of the fluctuations of the refractive index-tracking refractometry. Similarly, the wavelength of the laser source can be stabilized over the measuring range, effectively compensating for the refractive index changes. Otherwise, monitoring of length of the measuring range can give information about the thermal dilatation effects of frame of the whole measuring setup. This technique can find its way into high-precision positioning systems in nanometrology
Trvalý link: http://hdl.handle.net/11104/0227030